Ultra-precise distance and thickness measurements in the nanometer range
Optimized for industrial purposes and offering an accuracy that creates an unprecedented level of precision in optical distance and thickness measurements - these are the new white light interferometers from Micro-Epsilon. The portfolio comprises three different interferometer versions intended for different fields of applications. These systems achieve stable measurement results with resolutions in the subnanometer range.
With a resolution of
< 30 picometers, the innovative interferoMETERs from Micro-Epsilon achieve a
new level of precision in optical measurement technology. Depending on the
application, three different versions are available. The IMS5400-DS for high
precision and industrial distance measurements; the IMS5400-TH for precise
thickness measurements; and the IMS5600-DS with vacuum-suitable design for
distance measurements of subnanometer accuracy.
The high precision
IMS5400-TH is used for the thickness measurement of thin transparent materials.
The measurement is performed using just a single sensor regardless of the
distance from the measurement object which tolerates fluttering or moving
measurement objects. The near-infrared light source also enables thickness
measurements of anti-reflective coated glass.
The IMS5400-DS is used
for industrial distance measurements. The measuring system provides absolute
measurement values and detects, for example, steps and edges reliably without
signal loss. These compact and robust sensors can be integrated in restricted
installation spaces.
The IMS5600-DS is
designed for distance measurements in clean rooms and vacuum environments (up
to UHV). Special controller calibration enables subnanometer resolution, which
is required, for example, when aligning a sensor or positioning a stage.
The interferoMETERs consist of a controller, a sensor and a fiber optic cable. They are designed for industrial measurement tasks and so are equipped with a robust metal housing and highly flexible cables.
Numerous analog and digital interfaces such as Ethernet and EtherCAT enable easy connection. Configuration is performed via a user-friendly web interface for initial operation and parameter setting.
Published by Micro-Epsilon USA on Aug 10, 2020