Catalog White light interferometers

The innovative white light interferometers from Micro-Epsilon set a benchmark in high precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.



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Micro-Epsilon USA

www.micro-epsilon.com
E: [email protected]
T: (919) 787-9707
F: (919) 787-9706

Address
8120 Brownleigh Dr.
Raleigh, NC
27617
United States
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