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The innovative white light interferometers from
Micro-Epsilon set a benchmark in high precision distance and thickness measurements.
These sensors enable stable measurement
results with sub-nanometer resolution offering
a comparatively large measuring range and
offset distance. The interferometers are available in 3 series: the IMS5400-DS for high precision industrial distance measurements, the
IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS
for distance measurements with picometer
resolution.