High-precision white light interferometers


High-precision white light interferometers

Micro-Epsilon’s innovative white light interferometers are used for high-precision distance and thickness measurement with a sub-nanometer resolution offering a large measuring range. The compact and robust sensors are ideal for integration in confined spaces. A small light spot detects the sm...

+ Read more

Micro-Epsilon’s innovative white light interferometers are used for high-precision distance and thickness measurement with a sub-nanometer resolution offering a large measuring range. The compact and robust sensors are ideal for integration in confined spaces. A small light spot detects the smallest details and structures. 


With a resolution of < 30 picometers, the innovative interferoMETERs from Micro-Epsilon achieve a new level of precision in optical measurement technology. Depending on the application, three different versions are available. The IMS5400-DS for high precision and industrial distance measurements; the IMS5400-TH for precise thickness measurements; and the IMS5600-DS with vacuum-suitable design for distance measurements of subnanometer accuracy.

The high precision IMS5400-TH is used for the thickness measurement of thin transparent materials. The measurement is performed using just a single sensor regardless of the distance from the measurement object which tolerates fluttering or moving measurement objects. The near-infrared light source also enables thickness measurements of anti-reflective coated glass.

The IMS5400-DS is used for industrial distance measurements. The measuring system provides absolute measurement values and detects, for example, steps and edges reliably without signal loss. These compact and robust sensors can be integrated in restricted installation spaces.

The IMS5600-DS is designed for distance measurements in clean rooms and vacuum environments (up to UHV). Special controller calibration enables subnanometer resolution, which is required, for example, when aligning a sensor or positioning a stage.

- Read less

 
More information
 

Micro-Epsilon USA

www.micro-epsilon.com
E: [email protected]
T: (919) 787-9707
F: (919) 787-9706

Address
8120 Brownleigh Dr.
Raleigh, NC
27617
United States
View map

Follow  
Facebook   Twitter   YouTube   Blog   Pinterest
 
 
 
 
 
 
 

Close
CONTACT MICRO-EPSILON USA
* sorry this is a required field