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Micro-Epsilon’s innovative white light interferometers are used for high-precision distance
and thickness measurement with a sub-nanometer resolution offering a large
measuring range. The compact and robust sensors are ideal for integration in confined
spaces. A small light spot detects the sm...
Micro-Epsilon’s innovative white light interferometers are used for high-precision distance
and thickness measurement with a sub-nanometer resolution offering a large
measuring range. The compact and robust sensors are ideal for integration in confined
spaces. A small light spot detects the smallest details and structures.
With a resolution of
< 30 picometers, the innovative interferoMETERs from Micro-Epsilon achieve a
new level of precision in optical measurement technology. Depending on the
application, three different versions are available. The IMS5400-DS for high
precision and industrial distance measurements; the IMS5400-TH for precise
thickness measurements; and the IMS5600-DS with vacuum-suitable design for
distance measurements of subnanometer accuracy.
The high precision
IMS5400-TH is used for the thickness measurement of thin transparent materials.
The measurement is performed using just a single sensor regardless of the
distance from the measurement object which tolerates fluttering or moving
measurement objects. The near-infrared light source also enables thickness
measurements of anti-reflective coated glass.
The IMS5400-DS is used
for industrial distance measurements. The measuring system provides absolute
measurement values and detects, for example, steps and edges reliably without
signal loss. These compact and robust sensors can be integrated in restricted
installation spaces.
The IMS5600-DS is
designed for distance measurements in clean rooms and vacuum environments (up
to UHV). Special controller calibration enables subnanometer resolution, which
is required, for example, when aligning a sensor or positioning a stage.